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[资料共享] Integrated Nanodevice and Nanosystem Fabrication:Breakthroughs and Alternat...

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发表于 2019-12-4 14:20:35 | 显示全部楼层 |阅读模式
Integrated Nanodevice and Nanosystem Fabrication:Breakthroughs and Alternatives

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Since its invention, the integrated circuit requested new process modules or major and numerous architectural changes to enable the improvement of application performances, power consumption, and cost reduction. Silicon CMOS is now well established to offer the integration of several tens of billions of devices on a chip or in a system. Nowadays, important challenges emerge to introduce heterogeneous co-integration of materials and devices with the silicon CMOS 2D- and 3D-based platforms. At the same time, newfabrication techniques, allowing strong energy and variability efficiency, emerge as possible players to improve the various figures of merit of technology.

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